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58200 Kuala Lumpur,
Malaysia.
+603-7980 3721
+603-7980 3612

EPX180NE Dry pump 400V TEL TIM 1/4 water connectors A41944424

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EPX180NE Dry pump 400V TEL TIM 1/4 water connectors A41944424 EPX180NE Dry Pump EPX Vacuum Dry Pumps EDWARDS Semiconductor Dry Pumps
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Overview:
The new compact EPX180 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr.

Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.

The EPX NE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.

Features & Benefits:
Compact footprint – the EPX is more compact than the equivalent turbomolecular pump and primary pump combination. 
Low cost of ownership – zero routine maintenance with a 5 year service interval. 
Unique patent protected pumping mechanism – the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures. No separate “rough pumping” required. 
Ultra clean mechanism – EPX pumps have no grease or oil under vacuum and present no other source of potential contamination. 
Extremely reliable – based on field proven IPX technology, the EPX has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump. 
Water cooled – low environmental heat load 
Low noise and vibration – better working environment. Ideal for vibration sensitive environments.

Technical Data:
Peak speed 170 m3h-1
  105 ft3min-1
  2835 lmin-1
Ultimate vacuum  
  <1 x 10-4 mbar
  <7.5 x 10-5 Torr
  <1 x 10-2 Pa
Warm-up time (to nominal performance) 30 min
Inlet flange ISO63
Outlet flange NW25
Noise <59 dB(A)
Minimum cooling water flow rate 2 lmin-1
Cooling water temperature 15 – 35 °C
Nitrogen supply interface 1/4 in (6.5 mm) tube
Nitrogen supply pressure 3 x 105 – 7 x 105 pa
Minimum nitrogen purity 99.95%
Electrical Supply 400 V, 50/60 Hz 3 phase
Power at ultimate 1.4 kW
Rated motor power 3.0 kW
TIM None
Weight 43.5 kg

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