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+603-7980 3612

iGX1000N Dry pump 360-460V 50/60 Hz A54681959

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iGX1000N Dry pump 360-460V 50/60 Hz A54681959 iGX1000N Dry Pump iGX Dry Pumps EDWARDS Semiconductor Dry Pumps
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The iGX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. 
iGX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability. 
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Featues & Benefits:
  • Reduced Cost of Ownership
    • Up to a 50% reduction in utilities cost compared to iL/iH drypumps
    • No preventative maintenance
  • Flexible Installation Options
    • Small and light for easy installation
    • On-tool, close proximity, or remote
  • Possible Tool Throughput Improvements
    • One of the fastest load lock pumps available
  • Consistent Pumping Performance Globally
    • Pumping speed identical at 50 and 60 Hz
  • Reduced Ambient Noise
    • Only 55 dB(A)
  • Wide Range of Peak Speed
    • 100, 300, 600 and 800 m3h-1

Technical Data:
Peak speed 800 m3h-1
  471 cfm
  13333 l min-1
Ultimate pressure 1.00E-03 mbar
  7.50E-04 Torr
  0.10 Pa
Power at 700 Torr exhaust  
Ultimate 1.6 kW
AUC (Active Utility Controller) 1.05 kW
Water inlet* 2 slm
Nitrogen 4 or 14 slm
Footprint excluding exhaust 0.20 m2
Weight 230 kg
Inlet connection ISO100
Outlet connection NW25
Noise at ultimate < 55 dB(A)

* Requires constant flow valve accessory.

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