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nEXT85IH CF63 NW16/16 80W

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nEXT85IH CF63 NW16/16 80W nEXT85 Turbomolecular Pump nEXT Turbo Pumps EDWARDS Turbomolecular Pumps
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Overview:
The nEXT85 turbomolecular pump builds upon the success of the highly successful EXT75DX to deliver a pump with significantly improved performance in a smaller package. 

The rotor has been totally re-designed to optimise pump performance and achieve both higher speeds and higher compression while maintaining high levels of reliability.

In addition to enhanced performance nEXT85 benefits from the same service and operational functionalities from the larger nEXT range, including field serviceability and in-built intelligence, for a truly class leading product.

Features & Benefits:
•  Class leading performance in a reduced footprint
•  Enhanced customer choice with standard and compression focused variants
•  Increased operating envelope maximised by Edwards’ patented direct impeller temperature measurement technology
•  Additional flexibility from customised interstage and backing port position selection
•  4 year service with full end-user field serviceability
•  CMSD enabled low vibration levels
•  Intelligent pumps with included micro USB port and Edwards nST software allowing pump monitoring, control and configuration
•  Full suite of tailored accessories

Technical Data:
    NW40 ISO63 CF63 ISO100
Inlet Pumping Speed ls-1 N2 48 84 85
  Ar 44 80 80
  He 61 79 77
  H2 50 61 54
Compression Ratio N2 >1 x 1011
  Ar 1 x 109
  He 8.5 x 106
  H2 2.1 x 105
Interstage Pumping Speed (70 sccm gas load) ls-1 N2 6
  Ar 6
  He 9
  H2 10
Backing/Interstage Port Size NW16
Vent/Purge Port NW16
Maximum Continuous Inlet flow N2  
Forced Air Cooled (35 oC ambient) sccm 30
Forced Air Cooled (23 oC ambient) sccm 60
Water Cooled (35 oC ambient) sccm 50
Water Cooled (23 oC ambient) sccm 60
Natural Convection (30 oC ambient) sccm 10
Natural Convection (23 oC ambient) sccm 25
Maximum Continuous Backing Pressure N2  
Forced Air Cooled (35 oC ambient) mbar 10
Forced Air Cooled (23 oC ambient) mbar 16
Water Cooled (35 oC ambient) mbar 10
Water Cooled (23 oC ambient) mbar 16
Natural Convection (30 oC ambient) mbar 1
Natural Convection (23 oC  ambient) mbar 2
Start Time to 90% Speed (80 W) sec 115
Nominal Rotational Speed rpm 90,000
 
Mass kg 3.0
 
2.9 4.3 3.2
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