- EDWARDS Small Dry Pumps
- EDWARDS Acoustic Enclosures
- EDWARDS Chemical & Process Pumps
- EDWARDS Industrial Dry Pump
- EDWARDS Mechanical Boosters
- EDWARDS Oil Vapor Diffusion Pumps
- Diffstak Vapour Pumps
- Standard Diffstak 100/300M Vapour Pump
- Standard Diffstak 100/300P Vapour Pump
- Standard Diffstak 160/700M Vapour Pump
- Standard Diffstak 160/700P Vapour Pump
- Standard Diffstak 250/2000M Vapour Pump
- Standard Diffstak 250/2000P Vapour Pump
- Standard Diffstak 63/150M Vapour Pump
- Standard Diffstak 63/150P Vapour Pump
- Unvalved Diffstak 100/300C Vapour Pump
- Unvalved Diffstak 100/300F Vapour Pump
- Unvalved Diffstak 160/700C Vapour Pump
- Unvalved Diffstak 160/700F Vapour Pump
- Unvalved Diffstak 250/2000C Vapour Pump
- Unvalved Diffstak 63/150C Vapour Pump
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- High Throughput Diffusion Pumps
- Vapour Booster Pumps
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- Diffstak Vapour Pumps
- EDWARDS Semiconductor Dry Pumps
- EDWARDS Turbomolecular Pumps
- HTC Adapter Fittings
- HTC Aluminum Block Valve
- All in one HV aluminum angle valve
- Aluminum angle valve manual with bellows
- Aluminum angle valve manual without formed bellows
- Aluminum angle valve pneumatic double-acting with bellows sensor
- Aluminum angle valve pneumatic single-acting with bellows solenoid
- Aluminum angle valve with sensor
- N.C. HV aluminum angle valve
- Pneumatic normally open single with bellows & sensor
- Pneumatic normally open single with bellows, sensor & solenoid
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- HTC Bakeable All Metal Valve
- HTC Ball Valve
- HTC Centering Ring
- HTC Check Valve
- HTC Elbows-Tees-Crosses
- HTC Gate Valves
- HTC Hydroformend Vacuum Bellows
- HTC Pneumatic Butterfly Valve
- HTC Pneumatic Pendulum Valve
- HTC Teflon Coating Vacuum Valve
- HTC Transfer gate Valve and doors
- HTC Vacuum Accessories
- HTC Vacuum Clamps
- HTC Vacuum Feedthrough
- HTC Vacuum Flanges
- HTC Vacuum Poppet Valves
- HTC Vacuum Valve Kit
- HTC Vacuum Viewport
- HTC Venting Valve
11/11A, Jalan Perisa 2,
Happy Garden,
58200 Kuala Lumpur,
Malaysia.
iXH Dry Vacuum Pump System
The iXH family of dry pump products is an evolution of Edwards’ market-leading iH products and sets new standards for harsh process capability delivering low cost of ownership through process reliability in many of the worlds 300mm semiconductor and flat panel fabs.
The perfect range of high capacity dry pumps and boosters that can meet the ever increasing gas flow requirements encountered in the FPD, solar, semiconductor and LED manufacturing industries. A well as high peak pumping speed these pumps are equipped with features to ensure maximum reliability on harsh processes.
With a modular design, iXH pumps meet today’s process requirements and have road-mapped responses to emerging application challenges in leading edge fabs.
Applications:Target applications for Semiconductor include:
- PECVD
- High-K
- Low-K
- SACVD
- LPCVD
- ALD
- EPI
Target applications for FPD include:
- PECVD
- TCO
- Etch
- Transfer Chambers
- Greatly Increased Hydrogen Pumping Speeds for advanced EPI and solar processes.
- High capacity dry pumps and boosters give an Expanded Process Window to enhance yields.
- Smaller Footprint and Lower Height for ease of fitting in any fab.
- Complies with Key International Standards including UL, CE and S2. Either use consistently or leave out.