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Glovac Sdn Bhd
11/11A, Jalan Perisa 2,
Happy Garden,
58200 Kuala Lumpur,
Malaysia.
11/11A, Jalan Perisa 2,
Happy Garden,
58200 Kuala Lumpur,
Malaysia.
+603-7980 3721
+603-7980 3612
STP-iX455 Turbomolecular pump DN100CF
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Overview:
The STP-iX455 turbo-molecular pump features an innovative, magnetic bearing and motor drive system, providing a 50% reduction in vibration compared to previous generation turbo pumps. An integrated controller eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling.
The pump features 450 ls-1 pumping speed for nitrogen. The STP-iX455 is an excellent fit for electron microscope, metrology, lithography and other vibration sensitive applications.
Features & Benefits:
The STP-iX455 turbo-molecular pump features an innovative, magnetic bearing and motor drive system, providing a 50% reduction in vibration compared to previous generation turbo pumps. An integrated controller eliminates the need for a conventional, rack-mounted controller and interconnecting cables, and does not require water cooling.
The pump features 450 ls-1 pumping speed for nitrogen. The STP-iX455 is an excellent fit for electron microscope, metrology, lithography and other vibration sensitive applications.
Features & Benefits:
- Compact Design including a fully integrated controller
- Inovative, Self-Sensing magnetic bearing system
- Digital 5-axis control
- Vibration levels reduced by 50% compared to the existing turbo pumps
- Can be configured to run corrosive processes
- Automatic Balancing System (ABS) standard
- Automatic Vibration Reduction (AVR) standard
- UL Listed, CE marked and SEMI® S2 compliant
Technical Data:
Inlet flange | ISO100K/DN100CF | ISO160K/DN160CF |
Pumping Speed | ||
N2 | 300 ls-1 | 450 ls-1 |
H2 | 300 ls-1 | 460 ls-1 |
Compression ratio | ||
N2 | >108 | >108 |
H2 | >1 x 104 | >1 x 104 |
Ultimate pressure | 6.5x10-6 (5x10-8) | 10-8 (10-10) |
Weight | 15 kg | 16 kg |
Max working pressure | 1.3 x 10-1 Pa |
Allowable backing pressure | 67 Pa |
Rated speed | 55000 rpm |
Starting time | <6 min |
Mounting position | Any orientation |
Cooling method | Natural cooling (Air cooling fan when baking or gas pumping) |
Lubricating oil | Not necessary |
Backing pump | 240 lmin-1 |
Leakage Magnetic Flux | |
Axial direction | <100 m/Gauss |
Radial direction | <100 m/Gauss |
Ambient temperature range | 0 to 40 °C |
Storage temperature range | -25 to 55 °C |